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Airborne particle cleanliness level
Airborne particle cleanliness level
The cleanliness level of suspended particles in the air of clean rooms and clean areas (ISO14644-1/GB50073-2001)
| ISO14644-1 | FED STD 209E | ≥Concentration limit（Pc/m3） | |||||||
| ISO Class | English | Metric | 0.1μm | 0.2μm | 0.3μm | 0.4μm | 0.5μm | 1μm | 5μm |
| ISO1 | 10 | 2 | |||||||
| ISO2 | 100 | 24 | 10 | 4 | |||||
| ISO3 | 1,000 | 237 | 102 | 35 | 8 | ||||
| ISO4 | 1 | M1.5 | 10,000 | 2,370 | 1,020 | 10 | 352 | 83 | |
| ISO5 | 10 | M2.5 | 100,000 | 23,700 | 10,200 | 100 | 3,520 | 832 | 29 |
| ISO6 | 100 | M3.5 | 1,000,000 | 237,000 | 102,000 | 1,000 | 35,200 | 8,320 | 293 |
| ISO7 | 1000 | M4.5 | 10,000 | 352,000 | 83,200 | 2,930 | |||
| ISO8 | 10000 | M5.5 | 100,000 | 3,520,000 | 832,000 | 29,300 | |||
| ISO9 | 100000 | M6.5 | 1,000,000 | 35,200,000 | 8,320,000 | 293,000 | |||
Note:
① In the clean room inspection, each sampling point should be sampled at least 3 times.
② This standard is not applicable to characterize the physical, chemical, radioactive and vitality of suspended particles.① In the clean room inspection, each sampling point should be sampled at least 3 times.
③Determine 1 to 2 particle sizes according to process requirements.
④ The maximum allowable concentration Cn of various particles with a required particle size D is determined by the formula (3.0.1), and the required particle size is in the range of 0.1-5μm, including 0.1μm and 5μm.
Where Cn-the maximum allowable concentration of particles greater than or equal to the required particle size (pc/m3). Cn is rounded to the nearest integer, and the effective number of digits does not exceed three digits.
N-cleanliness level, the number does not exceed 9, the intermediate number between the cleanliness level integers can be 0.1 as the smallest allowable increment.
D-required particle size (μm).
0.1-constant, its dimension is μm.
3.0.2 The state of the air cleanliness level (empty, static, dynamic) should be determined through consultation with the owner.
3.0.3 The air cleanliness test method is carried out in accordance with the requirements of Appendix C.
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